Thermo Fisher Unveils New Semiconductor Analysis Tools for Enhanced Production
San Francisco, Friday, 10 January 2025.
Thermo Fisher Scientific introduces advanced workflows to boost semiconductor manufacturing efficiency and quality, addressing European industry needs.
Advanced Multi-Ion Technology
At the forefront of these innovations is the Helios 5 Hydra DualBeam system, featuring groundbreaking plasma focused ion beam scanning electron microscope (PFIB-SEM) technology. This advanced system uniquely incorporates four different ion species - argon, nitrogen, oxygen, and xenon - with the capability to switch between them in under ten minutes [3]. The system’s integration with the Thermo Scientific Elstar UC+ SEM Column enables unprecedented precision in semiconductor analysis and characterization [3][GPT].
Enhanced Metrology Capabilities
The new workflows incorporate cutting-edge metrology solutions designed specifically for microelectronics manufacturing. These tools utilize advanced techniques including Atmospheric Pressure Ionization Mass Spectrometry (API-MS), which monitors contaminants at single-digit ppt levels - achieving detection limits up to 100 times better than conventional methods [1]. Additionally, the system features automated TEM metrology routines that deliver sub-angstrom-level specificity, crucial for modern semiconductor development [1].
Quality Control and Analysis Innovation
A significant advancement in quality control comes from the integration of Raman spectroscopy capabilities. This non-destructive technique provides crucial insights into semiconductor crystallinity and dopant placement, with submicron resolution of approximately 532 nm [4]. The system’s temperature-controlled cells enable detailed analysis under various thermal conditions, essential for understanding temperature-driven crystallinity shifts in semiconductor materials [4].
Industry Impact and Future Outlook
As a company generating approximately $40 billion in annual revenue [5], Thermo Fisher Scientific’s latest innovations represent a significant step forward in semiconductor analysis technology. These new tools are particularly timely for the European semiconductor industry, which requires advanced solutions for quality control and efficient production. The integration of these technologies demonstrates Thermo Fisher’s continued commitment to its four-decade legacy in semiconductor solutions [1], positioning the company to address future challenges in microelectronics manufacturing [GPT].